Preparation Before Ion Implantation

Question: I would like to ask what preprocessing has to be done in order to prepare the steel surface before ion implantation of mould?


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Question:

I would like to ask what preprocessing has to be done in order to prepare the steel surface before ion implantation of mould? What cleaning methods should be used? Thank you very much.C.S.

Answer:

Outside the ion implantation chamber, it will be important to do two things: 1) remove as much surface contamination as possible; and 2) obtain a surface with very little roughness. A surface polishing would be important followed by cleaning. The cleaning should first remove any oil or greases from the polishing step. After rinsing, oxides can be removed with an acid pickle, often inhibited sulfuric acid. That should be followed with rinsing and a final DI water rinse. It will be important to do these steps just prior to the ion implantation since a very clean steel surface such as this can rust quickly.

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