Thin Film Characterization: Structural, Elemental, and Chemical

Instructor: Tom Christensen, University of Colorado

This webinar examines the broad range of techniques available to characterize thin film materials with an emphasis on structural, elemental and chemical characterization. We examine the range of properties of interest and how thin film properties may differ from bulk properties.

We examine imaging techniques such as optical microscopy, Scanning Electron Microscopy (SEM), Transmission Electron Microscopy (TEM), and scanning probe microscopies (STM, AFM). We also explore techniques, which provide information about structural properties including X-ray Diffraction (XRD), stylus profilometry, Quartz Crystal Monitors (QCM) and density measurements. Structural characterization from optical techniques such as ellipsometry is also considered.

The webinar examines techniques which explore elemental and chemical properties such as Auger electron spectroscopy (AES), Energy Dispersive Analysis of X-rays (EDAX), X-ray Photoelectron Spectroscopy (XPS, ESCA), Secondary Ion Mass Spectrometry (SIMS), and Rutherford Backscattering (RBS). AES is used as a prototype to examine quantitative analysis of spectroscopic data. Many of these techniques also provide information about structural properties.

Topical Outline:

Overview of wide range of characterization techniques for thin films including:

•Imaging (microscopies: optical, SEM, TEM, AFM)

•Structural properties (XRD, profilometry, QCM, ellipsometry)

•Elemental/Chemical properties (AES, EDAX, XPS, SIMS)

Pricing for Live Webinars:

Member $325 | Nonmember: $400  | Student: $200

Special Offer: Attend W-332-A and Receive 30% off Webinar W-332-B when registering for the second webinar.