Mass Flow Pressure Controllers Designed to Improve Vacuum Coating Results

Alicat Scientific’s MCE-Series and MCV-Series mass flow controllers support coating environments in vacuum chambers and can be used to replace legacy and discontinued MKS instruments.

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Alicat Scientific’s MCE-Series and MCV-Series mass flow controllers are designed as direct replacements for common industry mass flow controllers. The controllers support coating environments in vacuum chambers and can be used to replace legacy and discontinued MKS instruments.

The Alicat MCE and MCV can control gas flow rates as low as 0-0.5 sccm full scale or as high as 0-20 slpm full scale with control response times of 50 to 100 milliseconds. Fast response times can greatly improve vacuum coating end products and help eliminate target poisoning, the company says. The integrated pneumatic shut-off valve is normally closed, affording positive shut-off of 1 x 10-9 atm-sccm/sec Helium max.

The mass flow controllers operate on universal 12-30 VDC supply, and the company will match any pre-existing pin out on 9-pin or 15-pin D-sub connectors, for easy replacement. The units can be mounted in any orientation without recalibration.

Pre-programmed with calibrations for 98 gases, the MCE and MCV measure mass flow, volumetric flow, absolute pressure and temperature, with full temperature and pressure compensation. Units can be programmed directly through the instrument keypad or remotely via RS-232 (RS-485 also available).

To learn more, visit alicat.com.