The PV Precision optical coating system from Power Vision Ltd. is designed for coating small batches of substrates with fast cycle times. The standard substrate carrier has six positions for mounting substrates vertically, and special substrate tooling can maximize coating throughput and accommodate specific component types.
According to the company, the coating system incorporates a vacuum-load lock for high throughput and low maintenance while maintaining vacuum conditions suitable for precise and high-quality deposition. Door-to-door time to deposit a typical nine-layer BBAR is approximately 20 minutes.
The system is designed to coat six substrates up to 100 mm square, using a magnetron sputtering process to deposit the coatings with improved density, adhesion and refractive index. Unlike some other small systems, the PV Precision system is equipped with two target materials and has the option for a three-material configuration. It also uses a plasma source to provide in-situ plasma cleaning while also providing in-process ion bombardment.
The system features a low-temperature process designed to coat temperature-sensitive materials including CR39, polycarbonate and PET. This process is also suited for producing low-stress coatings on a variety of conventional substrates such as glass, silicon and metals. An optional substrate heater enables high-temperature deposition ranging to 500°C, and a Meissner trap also is available for vapour-critical processes.
The PV Precision system is suited for a variety of applications such as anti-reflection coatings, transparent conducting oxides, color/IR filters, visible and thermal control coatings, and thin films for photovoltaic applications.