The Compact 5 X-ray fluorescence measurement system is designed exclusively for the metal film measurement needs of the metal finishing and microelectronics industries. The system features micro-beam mechanical collimation and a precise, reproducible sample positioning stage coupled with a processed signal detection column that delivers superior stability and reproducibility in harsh plant environments. Sophisticated Fundamental Parameters measurement Algorithms and a Windows XP-based graphical user interface ensure consistent results in multiple user and application environments. The system is useful for metal film thickness and composition measurement of general metal finished parts, fasteners, tools and circuit boards and connectors. It is network compatible and can be programmed for automated measurements with a point and shoot graphic assisted motorized programmable stage.