Mass-Vac Vacuum Pump Inlet Traps Block Deposition Byproducts

Appears in Print as: 'Inlet Trap Suite Provides Options for Vacuum Pump Protection'

Mass-Vac is offering a range of customizable vacuum pump inlet traps for select vacuum-vapor deposition processes in research, semiconductor fabrication and industrial coating facilities.


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A photo of several of Mass-Vac's vacuum pump inlet traps
Photo Credit: Mass-Vac

Mass-Vac Inc. (North Billerica, Mass.) is offering a broad range of customizable vacuum pump inlet traps for production and research processes involving ALD, LPCVD, PECVD and related deposition processes.

These stainless steel MV Vacuum Pump Inlet Traps come in several sizes and are adjustable to user requirements for protecting vacuum pumps from the heavy particulate byproducts of ALD, LPCVD, PECVD and related deposition processes. Ideally suited for research laboratories, semiconductor fabrication and industrial coating facilities, the traps can provide up to 2,500 cubic inches of solids accumulation.

Users can select between stainless steel gauze; copper gauze; polypropylene in 2-, 5- and 20-micron sizes; Sodasorb; activated alumina; activated charcoal; and molecular sieve filter media for their traps. The 8-inch-diameter PosiTrap is ideal for research labs and the 12-inch-diameter MultiTrap, which has a first-stage knockdown baffle and two filtration stages, can be stacked to provide four stages of filtration.

Filter elements are sold separately.

Mass-Vac Inc. | 800-868-6700 |massvac.com/